AG Hofsäss - II- Institute of Physics

Rutherford Backscattering element analysis and depth profiling

Celebrating 100 years of Rutherford backscattering spectroscopy

The 19th International Conference on Ion Beam Analysis (IBA) was held 2009 in Cambridge to commemorate the 100th anniversary of the very first backscattering experiment, which has formed the core of the analysis tools for our community: IBA 2009 conference

The Ion Beam Analysis conference is a biennial series and has a long tradition of being the international forum to discuss recent research and future prospects in Ion Beam Analysis. The conference brings together physicists, materials scientists, biologists and also those who are interested in the analysis of any material using ion beams.


Here some examples of RBS spectra of thin film coatinge measured using 900 keV He ions:

Examples RBS Spectra